SEMI High-Tech Facility Committee
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Frank Chen (陳國益)
General Manager
Mega Union Technology Inc. ​
​​Education
M.S., Chemical Engineering, National Taiwan University of Science and Technology

​​Experience​​
  • Vice President at Ionics before 2005
  • General Manager of Mega Union Technology Inc. till now

​Profile
Mr. Chen is currently as General Manager at Mega Union Technology Incorporated. Mr. Chen leads Mega Union as the head of Waste Water and Reclaim treatment System in Semicon Industry. MU has built the Waste Water and Reclaim System from 45nm to 7 nm of the process in Semicon Production. Be the total Green Water Solution company, Mr. Chen is devoted to research and develop the waste water and chemical reclaim to reduce the waste discharge and waste activation and reuse. Those research not only save the semicon production cost but protect our environment from the waste and chemical pollution.

Mr. Chen is the leader of research and development. For those years, Mr. Chen has got lots of patents, including:
  • Waste water include TOC treatment method 2011~2027
  • TMAH Reclaim Equipment 2013~2029
  • Waste Water Reclaim treatment system and method 2016~2030
  • Acidic Waste Water Reclaim method 2011~2027
  • TMAH Reclaim Equipment and method (China) 2013~2032
  • Waste water include NH3 treatment method and equipment 2014~2031
  • TMAH reclaim Equipment and method 2013~2029
  • 2 Phase Vacuum degasifier tower 2012~2027
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  • Home
    • Origin
    • Mission
    • Cooperation
  • Events
  • Steering Board
    • 1st Steering Board
    • 2nd Steering Board
    • 3rd Steering Board
    • 4th Steering Board
  • Working Group
    • 2nd working Group
    • 3rd Working Group
    • 4th Working Group
  • Members
    • High-Tech Industry
    • Semiconductor Supplier
    • Construction Engineering
    • Academy
  • Join us