Yuh-Herng, Chen(陳玉衡)

General Manager 
ADAT Technology Co., Ltd. 

 

​Education

• MS. In Chemistry, The University of North Carolina at Charlotte
• BS. In Chemistry, National Sun Yat Sen University

​
Experience

• Dry Pump Product Manager, Edwards Technologies Ltd.
• Edwards CSA2.0/PdM Project Manager in Taiwan
• 2019 SEMI HTFC “Energy Saving and Waste Reduction” Symposium Speaker
• Sr. Product Development Engineer, Vishay Taiwan General Semiconductor
• RD Engineer, Wafer Works

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Topic: Edwards Autonomous Vehicle for Smart Manufacturing

Abstract:
Moving pumps around sub-fab is a hazardous task and time/labor consuming. Edwards Autonomous Vehicle is an innovative approach to address this issue in below directions

• Better Safety

          - Eliminate ergonomic injuries and reduce equipment damage from human error.

• More Efficient
  

          - Reduces tool idle time and better manpower utilization.
          - Pump arrives at the POC when needed and returns to storage autonomously.

• Future-focused
  

          -Integrates with inventory management, predictive maintenance software and inspection. Foundation for collaborative robots in
            the Sub-fab and Fab.