SEMI High-Tech Facility Committee
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圖片
Yuh-Herng, Chen(陳玉衡)
General Manager 
ADAT Technology Co., Ltd. 


 

​Education
  • MS. In Chemistry, The University of North Carolina at Charlotte
  • BS. In Chemistry, National Sun Yat Sen University
​
Experience
  • Dry Pump Product Manager, Edwards Technologies Ltd.
  • Edwards CSA2.0/PdM Project Manager in Taiwan
  • 2019 SEMI HTFC “Energy Saving and Waste Reduction” Symposium Speaker
  • Sr. Product Development Engineer, Vishay Taiwan General Semiconductor
  • RD Engineer, Wafer Works

Topic: Edwards Autonomous Vehicle for Smart Manufacturing

Abstract:
Moving pumps around sub-fab is a hazardous task and time/labor consuming. Edwards Autonomous Vehicle is an innovative approach to address this issue in below directions
  • Better Safety
          - Eliminate ergonomic injuries and reduce equipment damage from human error.
  • More Efficient
          - Reduces tool idle time and better manpower utilization.
          - Pump arrives at the POC when needed and returns to storage autonomously.
  • Future-focused
          -Integrates with inventory management, predictive maintenance software and inspection. Foundation for collaborative robots in
            the Sub-fab and Fab.


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  • Home
    • Origin
    • Mission
    • Cooperation
  • Events
  • Steering Board
    • 1st Steering Board
    • 2nd Steering Board
    • 3rd Steering Board
    • 4th Steering Board
  • Working Group
    • 2nd working Group
    • 3rd Working Group
    • 4th Working Group
  • Members
    • High-Tech Industry
    • Semiconductor Supplier
    • Construction Engineering
    • Academy
  • Join us