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Tzong-Ming Lee
Vice President and General Director (Materials and Chemical Research Laboratories)
Industrial Technology Research Institute |
BIO
Dr. Tzong-Ming Lee is Vice President of Industrial Technology Research Institute in Taiwan (ITRI) and General Director of Material and Chemical Research Laboratories, ITRI. He is also Deputy General Director of Circular Economy Strategy Office in ITRI. He received his Ph.D. in Chemical Engineering from National Tsing Hua University of Taiwan. Dr. Lee’s expertise is in epoxy/polyimide resin synthesis and related hybrid technologies, electronic package materials technologies, optical -electronic materials technologies. He has received many honors and awards, such as the R&D Contribution Award, MOEA; Gold Panel Award, MOEA; Outstanding TDP for Nonprofit Research Organization; National Innovation Industrial Award, MOEA; R&D 100 Awards; Wall Street Journal Technology Innovation Awards.
Dr. Tzong-Ming Lee is Vice President of Industrial Technology Research Institute in Taiwan (ITRI) and General Director of Material and Chemical Research Laboratories, ITRI. He is also Deputy General Director of Circular Economy Strategy Office in ITRI. He received his Ph.D. in Chemical Engineering from National Tsing Hua University of Taiwan. Dr. Lee’s expertise is in epoxy/polyimide resin synthesis and related hybrid technologies, electronic package materials technologies, optical -electronic materials technologies. He has received many honors and awards, such as the R&D Contribution Award, MOEA; Gold Panel Award, MOEA; Outstanding TDP for Nonprofit Research Organization; National Innovation Industrial Award, MOEA; R&D 100 Awards; Wall Street Journal Technology Innovation Awards.
Topic: Semiconductor Factory Technologies For Advanced Manufacturing Process 半導體先進製程關鍵廠務技術
Abstract:
隨著半導體製程朝5nm以下新世代高階製程的發展，除了晶片相關晶圓製程外，相關支援製程的廠務技術對於晶片良率與尺寸精度亦有重大影響，同時隨著全球綠色環保製造趨勢，滿足製程循環、低污染、與低廢棄物排放的需求，也是未來新世代廠半導體廠務發展的重點，工研院材化所在最近幾年藉由材料創新整合應用於水資源循環利用、水質關鍵指標監測、廢水去化應用與社會責任、廢氣微汙染控防治與原物料輸送管線安全監控等技術的開發，與半導體業者針對先進製程關鍵廠務技術進行相關開發，因應半導體製程工藝挑戰高階製造技術與12吋晶圓廠產能持續擴廠所需要的高科技廠房關鍵技術進行合作，除了維護其製程良率外並協助業者推動永續循環技術。藉此研討會期望能與科技產業緊密鏈結，共同致力於高科技廠房綠色環保技術開發與推動。