Speaker
Tony Chen (陳鏘澤), Technical Director, TSMC
Tony Chen (陳鏘澤), Technical Director, TSMC
Topic
Program to Reclaim Industrial Wastewater and Waste Chemical Circular Economic in TSMC
台積電再生水廠及循環經濟專區計劃
Abstract
The content of paper is to describe that TSMC is not only a company who committed to technology development in advanced IC manufacturing, but also to devote efforts into innovative approach to environmental-friendly activities.
First, uneven rainfall distribution due to the climate change and the limited capacity of water inventory so we need to face the drought situation frequently in Taiwan. As a manufacturing company, we do need ample water resource to support sustainable growth; therefore, TSMC decides to reclaim more water from multiple resources which include the municipal reclaimed water and industrial final discharge. In the paper we will present the study and plan how to reclaim the water resource from multiple wastewater streams into semiconductor manufacturing plant.
Second, liquid chemical is the essential and key material used in IC manufacturing process. Compared with conventional approaches that used waste chemical material were collected and transported to post-treatment and downgraded to be reused in others industries. Learning from the spirit of Cradle to Cradle which is a registered trademark of McDonough Braungart Design Chemistry (MBDC) consultants, TSMC is trying to deal with waste liquid and to aim for the level of electronic grade to recuse the chemical substances into IC manufacturing process. By this achievement, we are not only able to minimize the interdependence in different industries, but also we can reduce the consumption of raw material and minimize the waste simultaneously as all waste liquid chemical discharges can be treated through this approach. Today, we would like to share this plan and would like to inspire all of professional chemical companies to co-work with TSMC for developing the technology and to make the chemical substance be circulated and sustainably reused in IC manufacturing industry.
本報告主要闡述台積電在半導體先進製程技術發展的進程中，對整體環境保護的創新做為及對策。
其一，台灣因氣候變遷面臨降雨不均及整體蓄水能力有限，時而面臨缺水之虞，在面對持續成長所需水源時，毅然決定在高水質要求的半導體產業導入來自區域生活再生水及園區污水回收之再生水。藉此探討高階再生水回收流程之研究及實務上之規劃，以因應多元供應之水源於半導體製程的導入。
其二，針對化學品物料，從以往降階再利用提升至「從搖籃到搖籃」(Cradle to Cradle)的理念及思維，嘗試推動電子級原物料能持續回到電子級的品質以利再循環使用，除了可免除以往在不同產業間相互依存的關係之外，最重要的是當所有原物料皆可進入循環時，不僅能降低原物料的耗用而且廢棄物也將最小化，達到物質可以永續循環。藉此研討會的探討，讓原物料供應商能夠與使用者共同致力於永續循環的技術開發及推動。
Program to Reclaim Industrial Wastewater and Waste Chemical Circular Economic in TSMC
台積電再生水廠及循環經濟專區計劃
Abstract
The content of paper is to describe that TSMC is not only a company who committed to technology development in advanced IC manufacturing, but also to devote efforts into innovative approach to environmental-friendly activities.
First, uneven rainfall distribution due to the climate change and the limited capacity of water inventory so we need to face the drought situation frequently in Taiwan. As a manufacturing company, we do need ample water resource to support sustainable growth; therefore, TSMC decides to reclaim more water from multiple resources which include the municipal reclaimed water and industrial final discharge. In the paper we will present the study and plan how to reclaim the water resource from multiple wastewater streams into semiconductor manufacturing plant.
Second, liquid chemical is the essential and key material used in IC manufacturing process. Compared with conventional approaches that used waste chemical material were collected and transported to post-treatment and downgraded to be reused in others industries. Learning from the spirit of Cradle to Cradle which is a registered trademark of McDonough Braungart Design Chemistry (MBDC) consultants, TSMC is trying to deal with waste liquid and to aim for the level of electronic grade to recuse the chemical substances into IC manufacturing process. By this achievement, we are not only able to minimize the interdependence in different industries, but also we can reduce the consumption of raw material and minimize the waste simultaneously as all waste liquid chemical discharges can be treated through this approach. Today, we would like to share this plan and would like to inspire all of professional chemical companies to co-work with TSMC for developing the technology and to make the chemical substance be circulated and sustainably reused in IC manufacturing industry.
本報告主要闡述台積電在半導體先進製程技術發展的進程中，對整體環境保護的創新做為及對策。
其一，台灣因氣候變遷面臨降雨不均及整體蓄水能力有限，時而面臨缺水之虞，在面對持續成長所需水源時，毅然決定在高水質要求的半導體產業導入來自區域生活再生水及園區污水回收之再生水。藉此探討高階再生水回收流程之研究及實務上之規劃，以因應多元供應之水源於半導體製程的導入。
其二，針對化學品物料，從以往降階再利用提升至「從搖籃到搖籃」(Cradle to Cradle)的理念及思維，嘗試推動電子級原物料能持續回到電子級的品質以利再循環使用，除了可免除以往在不同產業間相互依存的關係之外，最重要的是當所有原物料皆可進入循環時，不僅能降低原物料的耗用而且廢棄物也將最小化，達到物質可以永續循環。藉此研討會的探討，讓原物料供應商能夠與使用者共同致力於永續循環的技術開發及推動。