Education
Experience
- PhD. In Chemistry with a focus on Molecular Spectroscopy at Laval University under the direction of Michel Pezolet and Robert Prudhomme
Experience
- 2018- present: FTIR & ICOS Global Sales Manager for ABB
- 20016-2018: North America Sales Manager for ABB
- 2012-2016: Canada Sales Manager for ABB
- 2003-2010: Global FTIR Sales & Marketing Manager for ABB
- 2000-2003: Semiconductor Industry Manager for ABB
- 1999-2000: Semiconductor Product Manager for Arkema
Subject: Off Axis Integrated Cavity Optical Spectroscopy applied to Semiconductor Airborne Molecular Contamination Monitoring
Abstract
Laser analyzers are well known for fast, sensitive and precise monitoring of gases. Significant advancements have been made over the last three decades, the initial technology introduction began with laser absorption spectroscopy (LAS), advancing to cavity ring down spectroscopy (CRDS), and the most recent commercialized advancement, off-axis integrated cavity optical spectroscopy (OA-ICOS). The operating principles of all three methods appear similar, in actual application, there are significant differences in design and performance. While each of these laser methods are in use today, OA-ICOS provides numerous advantages over the previously established technologies, very low limits of detection coupled with the high speed and long-term stability providing unmatched advantages over the historic laser-based techniques. A specific example is found in the measurements of HF, HCL and NH3 for AMC monitoring within a clean room. The needs for the measurements are clear, these gases corrode the features of a wafer and must be tightly managed. The implementation of OA-ICOS rapidly identify the contaminants at ultra-low levels of detection and operates reliably for extended periods with minimal hands on maintenance.
Abstract
Laser analyzers are well known for fast, sensitive and precise monitoring of gases. Significant advancements have been made over the last three decades, the initial technology introduction began with laser absorption spectroscopy (LAS), advancing to cavity ring down spectroscopy (CRDS), and the most recent commercialized advancement, off-axis integrated cavity optical spectroscopy (OA-ICOS). The operating principles of all three methods appear similar, in actual application, there are significant differences in design and performance. While each of these laser methods are in use today, OA-ICOS provides numerous advantages over the previously established technologies, very low limits of detection coupled with the high speed and long-term stability providing unmatched advantages over the historic laser-based techniques. A specific example is found in the measurements of HF, HCL and NH3 for AMC monitoring within a clean room. The needs for the measurements are clear, these gases corrode the features of a wafer and must be tightly managed. The implementation of OA-ICOS rapidly identify the contaminants at ultra-low levels of detection and operates reliably for extended periods with minimal hands on maintenance.