|
May Chang (張瑞枚)
Technical Director
New Fast Technology Co., Ltd. |
Education
Experience
- National Tsing Hua University, Master of Biomedical Engineering and Environmental Science
Experience
- New Fast Technology Co.,Ltd. / eight years /Technical Director
- TRIPOD Technology Corporation / two years/Supervisor
- AU Optronics Corporation / seven years/Assistant Manager
Subject: Intelligent On-line AMC Monitoring Technical Conclude in Fab
Abstract
How to effectively monitor and control the quality of manufacturing environment and problem detection has been a focus in semiconductor manufacturing processes in terms of micro-contaminant issues. Based on ITRS roadmap of 2015, this will specify what current difficulties and challenges are, and meanwhile illustrate what the requirements are for a efficient analysis instrument. With effective online monitoring skill and real-time data analysis applying on manufacturing process management , the optimization of product quality and detective rate can thus be achieved accordingly.
Abstract
How to effectively monitor and control the quality of manufacturing environment and problem detection has been a focus in semiconductor manufacturing processes in terms of micro-contaminant issues. Based on ITRS roadmap of 2015, this will specify what current difficulties and challenges are, and meanwhile illustrate what the requirements are for a efficient analysis instrument. With effective online monitoring skill and real-time data analysis applying on manufacturing process management , the optimization of product quality and detective rate can thus be achieved accordingly.