Speaker
Jui Hua Ting (丁瑞華), Department Manager, TSMC
Jui Hua Ting (丁瑞華), Department Manager, TSMC
Topic
Development of Wastewater Treatment and Reclamation Technology in TSMC
台積電廢水處理及回收技術進展
Abstract
The Paper starts with discussion of advanced semiconductor plants water usage trend, followed by analysis of advanced process waste water characteristics and issues. Based on the development roadmap of recycling or treatment technology, the segregation strategy of wastewater drain is designed.
Next, the three-stage development of TSMC wastewater treatment is introduced: (1) wastewater treatment: to comply with the effluent regulation; (2) Water reclamination: one drop of water to achieve 350% utilization; (3) Waste Recycling: Mining the gold in wastewater. The water reclamation and waste recycling technologies are expounded by case studies to explain the development process. It can be a reference for other companies in the recycling technology development; together we work on reducing wastewater and pollutant control.
Finally, the Paper identifies the issues and challenges we are facing now for semiconductor wastewater treatment, hopefully to resolve them with more effective, more energy-saving and environmentally friendly practices and technologies and to achieve zero environmental impact.
本報告首先探討先進半導體廠的用水趨勢，分析先進製程廢水的特性及問題，並依據後續回收或處理技術的發展藍圖，規畫先進廠房各種廢水的分流策略。
其次；介紹台積電廢水處理演進三部曲，(1) 廢水處理：符合排放納管標準，(2) 回收處理:：一滴水使用3.5次，(3) 活化再生：發掘廢水中的黃金。其中回收處理及活化再生作法及技術，將以台積成功案例為個案討論方式，說明技術發展的過程，希望做為友廠發展再生技術的參考，共同減少廢水排放的量與污染物濃度。
最後，提出半導體廢水處理現在與未來可能面臨到的問題及挑戰，期能尋找出更有效，更節能環保的作法及技術，達成環境零衝擊目標。
Development of Wastewater Treatment and Reclamation Technology in TSMC
台積電廢水處理及回收技術進展
Abstract
The Paper starts with discussion of advanced semiconductor plants water usage trend, followed by analysis of advanced process waste water characteristics and issues. Based on the development roadmap of recycling or treatment technology, the segregation strategy of wastewater drain is designed.
Next, the three-stage development of TSMC wastewater treatment is introduced: (1) wastewater treatment: to comply with the effluent regulation; (2) Water reclamination: one drop of water to achieve 350% utilization; (3) Waste Recycling: Mining the gold in wastewater. The water reclamation and waste recycling technologies are expounded by case studies to explain the development process. It can be a reference for other companies in the recycling technology development; together we work on reducing wastewater and pollutant control.
Finally, the Paper identifies the issues and challenges we are facing now for semiconductor wastewater treatment, hopefully to resolve them with more effective, more energy-saving and environmentally friendly practices and technologies and to achieve zero environmental impact.
本報告首先探討先進半導體廠的用水趨勢，分析先進製程廢水的特性及問題，並依據後續回收或處理技術的發展藍圖，規畫先進廠房各種廢水的分流策略。
其次；介紹台積電廢水處理演進三部曲，(1) 廢水處理：符合排放納管標準，(2) 回收處理:：一滴水使用3.5次，(3) 活化再生：發掘廢水中的黃金。其中回收處理及活化再生作法及技術，將以台積成功案例為個案討論方式，說明技術發展的過程，希望做為友廠發展再生技術的參考，共同減少廢水排放的量與污染物濃度。
最後，提出半導體廢水處理現在與未來可能面臨到的問題及挑戰，期能尋找出更有效，更節能環保的作法及技術，達成環境零衝擊目標。