|
Feng-Tang Chang (張豐堂)
President
JG Environmental Technology Co., Ltd. |
Education
Experience
- Ph. D, National Tsing Hua University
Experience
- Assistant Professor of National Chiao Tung Univ.
- Patent Attorney & HVAC P.E.
- MOEA(2016、2018)Taiwan SMEs Innovation Award
- MOEA(2014、2018)National Invention and Creation Award
- MOEA(2011)National Industrial Innovation Award
Subject: Performance Improvement Study of Thermal Swing Honeycomb Zeolite Adsorber for VOCs Laden Air Treatment on the Wafer Fab Application
Abstract
The VOCs emission quantity is thus expected to be controlled with special focuses on the next generation of wafer manufacturers. One of the most popular VOCs treatment equipments for the next generation of wafer manufacture fab is the thermal swing adsorber of honeycomb zeolite rotor with thermal oxidizer. However, limited information is available on the thermal swing adsorber of honeycomb zeolite rotor in the literature. This study intends to provide experimental data and discuss the performance improvement of the thermal swing adsorber of honeycomb zeolite rotor for the VOCs exhaust laden air that simulated the emission characteristics of an wafer manufacturer¢s fab. The results showed that the VOCs removal efficiency such as IPA and PGMEA on the novel honeycomb zeolite rotor adsorber is much higher than that exiting rotor adsorber. Under proper operation conditions of increasing the superficial velocity or the concentrate ratio, and increased the desorption outlet temperature at the same thickness of the adsorber, the VOCs removal efficiency can be increased and save operation energy cost.
Abstract
The VOCs emission quantity is thus expected to be controlled with special focuses on the next generation of wafer manufacturers. One of the most popular VOCs treatment equipments for the next generation of wafer manufacture fab is the thermal swing adsorber of honeycomb zeolite rotor with thermal oxidizer. However, limited information is available on the thermal swing adsorber of honeycomb zeolite rotor in the literature. This study intends to provide experimental data and discuss the performance improvement of the thermal swing adsorber of honeycomb zeolite rotor for the VOCs exhaust laden air that simulated the emission characteristics of an wafer manufacturer¢s fab. The results showed that the VOCs removal efficiency such as IPA and PGMEA on the novel honeycomb zeolite rotor adsorber is much higher than that exiting rotor adsorber. Under proper operation conditions of increasing the superficial velocity or the concentrate ratio, and increased the desorption outlet temperature at the same thickness of the adsorber, the VOCs removal efficiency can be increased and save operation energy cost.